| 发明名称 |
Micromechanical device with thinned cantilever structure and related methods |
| 摘要 |
In one aspect, a microelectromechanical device and method of producing the device includes an accelerometer with a thinned flexure structure. In another embodiment, the device and method of producing the device includes an accelerometer and a pressure sensor integrated on a single chip.
|
| 申请公布号 |
US2006101912(A1) |
申请公布日期 |
2006.05.18 |
| 申请号 |
US20050322852 |
申请日期 |
2005.12.30 |
| 申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
WU GUANGHUA;MIRZA AMIR R. |
| 分类号 |
G01P15/09;B60C23/04;B81B3/00;B81C1/00;B81C99/00;G01L9/00;G01L19/00;G01P15/08;G01P15/12;H01L29/84 |
主分类号 |
G01P15/09 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
