| 摘要 |
<p>The present invention provides a coating device and coating method, which can hold a constant discharge amount of a coating liquid at each shot even if shots (applications) of plural times are carried out continuously. When the first shot finishes, opening and closing valves 14 and 21 are closed, an opening and closing valve 11 is opened, and a syringe pump 9 is returned to the original position to send the coating liquid again in a coating liquid-pooled space S via a degassing module 8. At this time, the inside of the coating liquid-pooled space S is under a positive pressure with an excessive pressure in order to prevent the entrainment of air from outside. Thereafter, the opening and closing valve 11 is closed to open an opening and closing valve 17 of a branch line 15 at the same time. Similarly, the excessive pressure inside the coating liquid-pooled space S is removed and decreases up to pressures close to the atmosphere pressure. Thus, by removing the excessive pressure inside the coating liquid-pooled space S just before each shot, the state before the discharge of each shot can be held always in a constant condition.</p> |
