| 摘要 |
A bonding apparatus 10 including an X and Y motor parts 20 and 50 , which have substantially the same construction, and a moving table 60 , which can be moved in the XY plane by these motor parts. The X motor part 20 and Y motor part 50 are connected to the moving table 60 by joint mechanisms 42 and 52 that are rotatable. In the X and Y motor parts 20 and 50 , the movable coils 30 of the movable elements 24 are shaft-supported by shaft-supporting mechanisms 36 so that these coils are rotatable about the Z axis, and the shaft-supporting mechanisms 36 are guided so as to be movable linearly in the X and Y axial directions respectively by a guide mechanism formed with guide rails 38 and linear guides 37. |
