| 摘要 |
PROBLEM TO BE SOLVED: To provide a correction method of a measurement error and an electronic component characteristic measuring device capable of reducing measurement of a standard sample. SOLUTION: At least three kinds of samples 50, 52, 54 for acquiring correction data are measured respectively relative to at least one corresponding port (hereafter referred to as a 'specific port') in the mounted state on a test tool and a reference tool, and the first mathematical expression for correlating measured values of the test tool and the reference tool relative to the specific port is determined. Through devices 46, 48 for acquiring the correction data for connecting the specific port to another port are measured respectively in the mounted state on the test tool and the reference tool. The second mathematical expression for correlating measured values of the test tool and the reference tool relative to another port is determined. An optional electronic component is measured in the mounted state on the test tool, and an estimated value of the electric characteristic of the electronic component which is supposed to be acquired if the electronic component is mounted on the reference tool and measured is calculated by using the first mathematical expression and the second mathematical expression. COPYRIGHT: (C)2006,JPO&NCIPI
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