| 摘要 |
PROBLEM TO BE SOLVED: To provide an aspheric surface shape measuring method capable of realizing aspheric surface measurement by an interferometer at low cost, and performing surface shape measurement highly accurately. SOLUTION: Concerning the interferometer for detecting by a detector an interference fringe acquired by allowing inspection light reflected by the inspection surface on an inspection object and reference light having a reference wave front to interfere with each other, and measuring the surface shape of the inspection surface based on information of the detected interference fringe, this method has an actual measuring process for measuring the surface shape of the inspection surface by the interferometer, a simulation process for performing simulation of surface shape measurement by the interferometer by performing so-called ray tracing for calculating the coordinate where the ray passes based on the law of refraction by using information of an optical element in the interferometer, and a surface shape determination process for determining the inspection surface shape so that surface shape actual measurement data measured in the actual measuring process agrees with surface shape simulation data calculated in the simulation process and outputting it as a surface shape measurement result. COPYRIGHT: (C)2006,JPO&NCIPI
|
