Protection of nozzle structures in a liquid-ejection integrated circuit device

摘要

A liquid-ejection integrated circuit device includes a substrate that defines a plurality of liquid inlet channels. A drive circuitry layer is positioned on the substrate. A plurality of nozzle chamber structures is positioned on the substrate. Each nozzle chamber structure defines a nozzle chamber in communication with a respective inlet channel and a liquid ejection port and incorporates a movable liquid ejection member that serves to eject liquid from the liquid ejection port when displaced. A micro-electromechanical actuator is connected to the drive circuitry layer to receive drive signals and is operable on the movable liquid ejection member to displace the liquid ejection member. A nozzle guard is mounted on the substrate and defines a plurality of apertures in alignment with respective liquid ejection ports. The nozzle guard and the substrate have substantially the same coefficient of thermal expansion to inhibit the apertures moving out of alignment with the liquid ejection ports as a result of heating of the substrate.