发明名称 |
METHODS OF PATTERNING A SURFACE USING SINGLE AND MULTILAYER MOLECULAR FILMS |
摘要 |
Surface features are fabricated using a single layer or multi-layer molecular resist. The resist is preferably a selective adsorption resist. Selective adsorption resist is a resist that allows a deposited material to penetrate the resist such that the resist will reform on the top of the deposited material. Also, a nanofabricated system enables monitoring of the addition or removal of molecular species or proteins from a junction by monitoring the electronic properties of the junction. |
申请公布号 |
WO2005083519(A3) |
申请公布日期 |
2006.05.18 |
申请号 |
WO2005US06259 |
申请日期 |
2005.02.25 |
申请人 |
THE PENNSYLVANIA STATE UNIVERSITY RESEARCH FOUNDATION, INC.;MCCARTY, GREGORY S. |
发明人 |
MCCARTY, GREGORY S. |
分类号 |
G03F7/00;G03F7/40;H01L21/4763 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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