发明名称 METHODS OF PATTERNING A SURFACE USING SINGLE AND MULTILAYER MOLECULAR FILMS
摘要 Surface features are fabricated using a single layer or multi-layer molecular resist. The resist is preferably a selective adsorption resist. Selective adsorption resist is a resist that allows a deposited material to penetrate the resist such that the resist will reform on the top of the deposited material. Also, a nanofabricated system enables monitoring of the addition or removal of molecular species or proteins from a junction by monitoring the electronic properties of the junction.
申请公布号 WO2005083519(A3) 申请公布日期 2006.05.18
申请号 WO2005US06259 申请日期 2005.02.25
申请人 THE PENNSYLVANIA STATE UNIVERSITY RESEARCH FOUNDATION, INC.;MCCARTY, GREGORY S. 发明人 MCCARTY, GREGORY S.
分类号 G03F7/00;G03F7/40;H01L21/4763 主分类号 G03F7/00
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