Verfahren zur Charakterisierung und Simulation eines chemisch-mechanischen Polier-Prozesses,申请号DE20001065380-传众专利搜索

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发明名称	Verfahren zur Charakterisierung und Simulation eines chemisch-mechanischen Polier-Prozesses
摘要
申请公布号	DE10065380(B4)	申请公布日期	2006.05.18
申请号	DE20001065380	申请日期	2000.12.27
申请人	INFINEON TECHNOLOGIES AG	发明人	DICKENSCHEID, WOLFGANG;SPRINGER, GOETZ;MEYER, FRANK
分类号	B24B1/00;B24B37/04;B24B51/00;H01L21/302;H01L21/304	主分类号	B24B1/00
代理机构		代理人
主权项
地址

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