| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic actuator having a self-holding function for accurately positioning a finely movable element, and to provide an optical device using the electromagnetic actuator. SOLUTION: A permanent magnet movable part 1 is so driven as to come into contact with a yoke 6 by using two coils 8 and 9, then a magnetic saturation takes place in a yoke hole 7 part, strong magnetic attraction force is applied on a movable magnetic material 10 by a resulted leaked magnetic flux, and a movable mirror 11 is driven toward the yoke 5 side. Further, the magnetic attraction force acting on the movable magnetic material 10 is released by driving the permanent magnet movable part 1 toward the yoke 6 side, thus the movable mirror part 11 is separated by the restoring force of a flexible part 12. COPYRIGHT: (C)2006,JPO&NCIPI |
