| 摘要 |
PROBLEM TO BE SOLVED: To prevent a semiconductor element for detecting an X-ray from being affected by atmospheric humidity by storing the semiconductor element in a vessel and blocking the inside of the vessel from the atmosphere. SOLUTION: The vessel 10 is formed of a pedestal 14 and a cap 16. A proximity of the outer periphery of the pedestal 14 and a flange 18 of the cap 16 are closely jointed to each other. A circular opening 22 is formed in the cap 16, and a beryllium window 24 is closely jointed so as to cover the opening 22. An APD 12 is mounted on a substrate 26, and the substrate 26 is stuck to the inner surface of the pedestal 14. Two through holes 28 are formed in the pedestal 14, and a first lead terminal 30 and a second lead terminal 32 pass the through holes 28, respectively. The through parts are closely sealed by a glass hermetic seal 38. The inside of the vessel 10 is a sealed space blocked from the atmosphere, and the sealed space is filled with dry nitrogen gas. COPYRIGHT: (C)2006,JPO&NCIPI
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