| 摘要 |
PROBLEM TO BE SOLVED: To correct fogging generated in a picked-up image to recognize a defect accurately. SOLUTION: A known image 31 of a flat panel display is imaged by a camera to acquire a concentration value in camera coordinates 35 corresponding to each picture element position. Each coordinate position of the corresponding camera coordinates is correlated with FPD coordinates 41 corresponding to the each picture element position of the flat panel display to form a coordinate correspondence table 42. The coordinates are found therein over up to a value smaller than a decimal point based on the concentration value, coordinates having the same value in a figure smaller than the decimal point are collected to form subpixel coordinates 51, 52 the value by the value, and a neighboring image concentration distribution is formed in every of the subpixel coordinates. The concentration value in the camera coordinates for inspection acquired in the inspection is transformed into a corresponding coordinates for the inspection corresponding to the each pixel position of the flat panel display, based on the correspondence table 41, and an estimated image corresponding to a luminescent brightness of the flat panel display is formed based on the neighboring concentration distribution to inspect the defect. COPYRIGHT: (C)2006,JPO&NCIPI
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