| 发明名称 |
Pneumatic method and apparatus for nano imprint lithography |
| 摘要 |
A method (and apparatus) for nano lithography, includes applying a pneumatic pressure to at least one of a surface of a semi-rigid mask or template and a portion of a surface of a resist-coated workpiece, and, by the applying of the pneumatic pressure, transferring a pattern from the mask to the workpiece.
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| 申请公布号 |
US2006105571(A1) |
申请公布日期 |
2006.05.18 |
| 申请号 |
US20040989078 |
申请日期 |
2004.11.16 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COLBURN MATTHEW E.;MARTIN YVES C.;VAN KESSEL THEODORE G.;WICKRAMASINGHE HEMATHA K. |
| 分类号 |
B29C59/02;B29C33/58;B29C71/04;H01L21/302;H01L21/461 |
主分类号 |
B29C59/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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