| 发明名称 |
Method of descaling a mask |
| 摘要 |
Provided is a method of descaling a mask that quickly and effectively removes a material attached to the mask. The method includes: directing a laser beam onto a material attached to the mask; and removing the material attached to the mask. |
| 申请公布号 |
US2006102194(A1) |
申请公布日期 |
2006.05.18 |
| 申请号 |
US20050280542 |
申请日期 |
2005.11.15 |
| 申请人 |
|
发明人 |
KIM EUI-GYU;KIM TAE-HYUNG |
| 分类号 |
B08B3/12;B08B3/00;B08B3/04;B08B3/08;B08B3/10;B08B7/04;C23C14/04;G03F1/00;H01L51/50;H05B33/10 |
主分类号 |
B08B3/12 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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