| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To inspect even a part in which illumination light is shielded by a positioning member without any problems. <P>SOLUTION: A tip surface 352 of a press nib 35 for positioning both the end sections of a substrate is formed in a specular surface, and is inclined by an angle ofδto the vertical direction. The illumination light from a point A required for detecting the inclination angle of a fillet 41 that is a part to be inspected is shielded by the press nib 35. However, by adjusting the inclination angleδ, it can be set that the illumination light from a point B that opposes the point A is subjected to specular surface reflection by the tip surface 352 of the press nib 35 and the reflection light is applied to the fillet 41 from the same direction as light from the point A. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
