| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a defect inspection device and defect inspection method capable of omitting a false defect and inspecting a defect at high inspection sensitivity. <P>SOLUTION: A defect detecting means 2 detects a defect on the surface of a sample at a predetermined inspection sensitivity, a false defect specifying means 4 specifies a false defect from defect information acquired by the defect detection, and a non-inspected region setting means 5 sets the detection part of the specified false defect in a non-inspected region. The defect detecting means 2 repeats the defect detection without inspecting the set non-inspected region, so that the inspection sensitivity can be increased. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
