| 摘要 |
PROBLEM TO BE SOLVED: To prevent the deterioration of mechanical strength in entire elements, and to reduce the delay of a signal propagating through wiring. SOLUTION: First and third insulating layers for composing each wiring layer 100 contain a silicon carbonitride film, silicon carbide, and/or silicon oxide. A second insulating layer in a lower wiring layer contains the silicon oxide. A second insulating layer in an upper wiring layer contains fluorinated silicon oxide and/or carbonated silicon oxide. The relative dielectric constant of the second insulating layer in the lower wiring layer is set smaller than that of the second insulating layer in the upper wiring layer. COPYRIGHT: (C)2006,JPO&NCIPI
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