METHOD FOR DETECTING EXTRANEOUS MATTER ON THERMAL TREATMENT PLATE, THERMAL TREATMENT DEVICE, PROGRAM, AND COMPUTER READABLE RECORDING MEDIUM CONTAINING THE PROGRAM

摘要

A thermal plate is divided into a plurality of sections. An accumulated values of temperature change of each section when a substrate is placed on the thermal plate in a normal state not having an extraneous matter is collected. According to the accumulated value during normal state, a Malanobis reference space in the judgment analysis method is created. During actual thermal treatment, an accumulated value of temperature change of each section when a substrate is placed on the thermal plate is detected. According to the accumulated value during the treatment and the Mahalanobis reference space obtained in advance, the Mahalanobis distance for the accumulated value during treatment is calculated. By comparing the calculated Mahalanobis distance to a predetermined threshold value, it is judged whether the thermal plate has any extraneous matter.