| 发明名称 |
SUBSTRATE INSPECTION APPARATUS |
| 摘要 |
<p>A substrate inspection apparatus having a substrate inspection tool (7) mounted on one of a fixed side base (3) and a movable side base (2) and a substrate retaining tool (5) mounted on the other base and lifting the movable side base (2). A substrate holding unit (12) of a drawer structure is disposed between the substrate inspection tool (7) and the substrate retaining tool (5) so that the substrate holding unit (12) can be lifted by following up the movable base (2).</p> |
| 申请公布号 |
WO2006051643(A1) |
申请公布日期 |
2006.05.18 |
| 申请号 |
WO2005JP16032 |
申请日期 |
2005.09.01 |
| 申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA;KUBO, KATSUHIDE |
发明人 |
KUBO, KATSUHIDE |
| 分类号 |
G01R31/28 |
主分类号 |
G01R31/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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