ALIGNMENT METHOD AND DEVICE, EXPOSURE METHOD AND DEVICE, METHOD FOR MANUFACTURING THERMAL HEAD, THERMAL HEAD, AND PRINTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique to align a substrate having glaze to a photomask with high accuracy.

SOLUTION: The alignment method for a mask and a substrate includes a first focusing step of focusing to an alignment mark 31 disposed on a photomask 30, a recording step of recording image data, a second focusing step of focusing to a substrate 11, and a superposing step of superposing the image data recorded in the recording step while keeping the substrate 11 as focused. An alignment detecting system 22 is moved by R/2 in the second focusing step.

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