| 摘要 |
A method of inspecting an array substrate comprising inspecting the drive circuit unit by supplying an electric signal to the drive circuit unit while the array substrate is placed in a tester chamber, and by detecting the electric signal that flowed through the drive circuit unit, and irradiating an electron beam to the pixel electrode charged with an electrical charge, and inspecting the pixel electrode based on a data of a secondary electron emitted from the pixel electrode.
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