| 摘要 |
A pad electrode of a field effect transistor is formed solely of a pad metal layer without providing a gate metal layer. A high concentration impurity region is provided below the pad electrode, and the pad electrode is directly contacted to a substrate. Predetermined isolation is ensured by the high concentration impurity region. Accordingly, in a structure not requiring a nitride film as similar to the related art, it is possible to avoid defects upon wire boding attributing to hardening of the gate metal layer. Therefore, in the case of a buried gate electrode structure for enhancing characteristics of the field effect transistor, it is possible to enhance reliability and yields. |
