发明名称 METHOD AND APPARATUS FOR FORMING A THIN-FILM SOLAR CELL USING A CONTINUOUS PROCESS
摘要 <p num="1"><br/><br/><br/>The present invention relates to new methods for manufacturing photovoltaic <br/>devices and an apparatus for practicing those methods of manufacture. The <br/>present invention employs a transfer-through system for advancing work piece <br/>substrates through an integrated apparatus of multiple treatment chambers that <br/>control each of the manufacturing processes.<br/>
申请公布号 CA2586966(A1) 申请公布日期 2006.05.18
申请号 CA20052586966 申请日期 2005.11.10
申请人 DAYSTAR TECHNOLOGIES, INC. 发明人 TUTTLE, JOHN R.
分类号 C23C16/00 主分类号 C23C16/00
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