发明名称 |
METHOD AND APPARATUS FOR FORMING A THIN-FILM SOLAR CELL USING A CONTINUOUS PROCESS |
摘要 |
<p num="1"><br/><br/><br/>The present invention relates to new methods for manufacturing photovoltaic <br/>devices and an apparatus for practicing those methods of manufacture. The <br/>present invention employs a transfer-through system for advancing work piece <br/>substrates through an integrated apparatus of multiple treatment chambers that <br/>control each of the manufacturing processes.<br/>
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申请公布号 |
CA2586966(A1) |
申请公布日期 |
2006.05.18 |
申请号 |
CA20052586966 |
申请日期 |
2005.11.10 |
申请人 |
DAYSTAR TECHNOLOGIES, INC. |
发明人 |
TUTTLE, JOHN R. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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