| 发明名称 |
ELECTRONIC CIRCUIT DEVICE HAVING SILICON SUBSTRATE |
| 摘要 |
An electronic circuit device having a silicon substrate is provided comprising: a silicon substrate having a semiconductor element and a recess; and at least one passive element which is formed by a process different from a silicon planar process by which the semiconductor element is formed. In the electronic circuit device, the passive element is entrenched in the recess of the silicon substrate, and the semiconductor element formed on the silicon substrate is electrically connected to the passive element. |
| 申请公布号 |
KR20060045375(A) |
申请公布日期 |
2006.05.17 |
| 申请号 |
KR20050027157 |
申请日期 |
2005.03.31 |
| 申请人 |
SEIKO INSTRUMENTS KABUSHIKI KAISHA ALSO TRADING AS SEIKO INSTRUMENTS INC.;ISHIDA MAKOTO |
发明人 |
ISHIDA MAKOTO;SAWADA KAZUAKI;TAKAO HIDEKUNI;SUDO MINORU |
| 分类号 |
H01L23/29;H01L25/00;B81B7/00;G01P15/00;H01L21/335;H01L23/52;H01L25/04;H01L25/065;H01L25/07;H01L25/16;H01L25/18;H01L29/06;H01L29/84 |
主分类号 |
H01L23/29 |
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