| 摘要 |
<p>The invention relates to a scan head that is part of a laser drilling and cutting device. Said scan head comprises the following components which are placed in series along the light path of the laser: an intensity-regulating beam damping unit (I) in connection with a wobbling unit (II) that regulates a parallel beam displacement; a beam expander telescope (III) which increases the cross section of the laser beam; a scan block (IV) that guides the focus of the laser beam; an operating unit (V) which focuses the laser beam onto the sample; and additional testing and control units that can be optionally coupled into the light path. The beam damping unit (I) is provided with a series of elements encompassing a small ?/2 plate or retarder (1), a first Brewster window (2), and a second Brewster window (2a), said series of elements being positioned in the light path. The retarder and/or at least one of the two Brewster windows is/are embodied in a rotatable manner. The wobbling unit (II) is composed of an assembly that is inserted into the light path and comprises two plane-parallel windows (3, 4). The axis of rotation of the first plane-parallel window (3), the axis of rotation of the second plane-parallel window (4), and the direction of propagation of the laser beam are disposed orthogonally in relation to each other. The retarder or the plane-parallel windows is/are appropriately moved by galvanometer units.</p> |
