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发明名称
METHOD AND APPARATUS FOR PLASMA GENERATION
摘要
申请公布号
EP1656688(A2)
申请公布日期
2006.05.17
申请号
EP20040778627
申请日期
2004.07.19
申请人
SIONEX CORPORATION
发明人
MILLER, RAANAN, A.;NAZAROV, ERKINJON, G.;KRYLOV, EVGENY;EICEMAN, GARY, A.;WRIGHT, JOHN, A.;KENDIG, STEPHEN, D.;MORRIS, JAMES, C.;CAMERON, DOUGLAS, B.
分类号
H01J27/24;H01J49/10;H01J49/16;H01J49/40;H01J49/42;H01J61/68;H01J61/90;(IPC1-7):H01J49/10
主分类号
H01J27/24
代理机构
代理人
主权项
地址
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