发明名称 Method of controlling manufacturing process of photoelectric conversion apparatus
摘要 Disclosed is a method of controlling a manufacturing process of a photoelectric conversion apparatus, comprising putting a mark (3) for controlling the manufacturing process in a peripheral region (2) on a surface of a transparent substrate or in that region of a side surface of the transparent substrate, which is not irradiated with the laser beam used for the laser-scribing of each of a transparent electrode layer, a semiconductor layer and a reverse electrode layer, the mark (3) being read in the subsequent process and the subsequent process being controlled by utilizing the mark thus read.
申请公布号 EP1089346(A3) 申请公布日期 2006.05.17
申请号 EP20000104449 申请日期 2000.03.06
申请人 KANEKA CORPORATION 发明人 HIRAISHI, MASAFUMI;SAWAI, KAZUNORI
分类号 H01L31/04;H01L31/18;H01L27/142;H01L31/042;H01L31/20 主分类号 H01L31/04
代理机构 代理人
主权项
地址