| 摘要 |
A method of efficiently fabricating a multipole lens using a simple procedure is offered. The multipole lens has plural polar elements (23) and an annular holding member (25). Each polar element has a held portion (22). The annular holding member is provided with through-holes (25a) for holding the held portions of the polar elements. A resin (24) is injected into the through-holes in the holding member via openings (32) formed in the holding member, the openings being in communication with the through-holes. The injected resin is cured, thus holding the held portions of the polar elements to the holding member within the through-holes. The invention also extends to the multipole lens so fabricated, and to a charged-particle beam instrument comprising the multipole lens. |
