发明名称 SIGNAL DETECTION CONTACTOR AND SIGNAL CORRECTING SYSTEM
摘要 A signal detection contactor has a contactor main body and a plurality of coaxial bodies. Each coaxial body includes a core wire. The core wire is used for coming into contact with a probe of a prober and for receiving a signal transmitted from a tester, in order to calibrate a phase difference among signals transmitted through a plurality of probes. <IMAGE>
申请公布号 EP1498942(A4) 申请公布日期 2006.05.17
申请号 EP20030746407 申请日期 2003.03.05
申请人 TOKYO ELECTRON LIMITED 发明人 WATANABE, CHIHIRO
分类号 G01R1/06;G01R1/067;G01R1/04;G01R31/28;G01R35/00;H01L21/66 主分类号 G01R1/06
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