发明名称 |
High current density particle beam system |
摘要 |
The present invention relates to a charged particle unit for deflecting and energy-selecting charged particles of a charged particle beam 335. Thereby, a double-focusing sector unit for deflecting and focusing the charged particle beam and an energy-filter 460 forming a potential is provided, whereby charged particles of the charged particles beam are redirected at the potential-saddle depending on the energy of the charged particles. |
申请公布号 |
EP1657736(A1) |
申请公布日期 |
2006.05.17 |
申请号 |
EP20040027115 |
申请日期 |
2004.11.15 |
申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
BRODIE, ALAN D.;CREWE, DAVID A.;FROSIEN, JUERGEN;LANIO, STEFAN;SCHOENECKER, GERALD |
分类号 |
H01J37/244;H01J37/05;H01J37/28 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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