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发明名称
NOZZLE ARRANGEMENT
摘要
申请公布号
EP1565268(B1)
申请公布日期
2006.05.17
申请号
EP20030785685
申请日期
2003.11.28
申请人
ATOTECH DEUTSCHLAND GMBH
发明人
KOPP, LORENZ;KUNZE, HENRY;WIENER, FERDINAND
分类号
B05B1/20;B08B3/02;H01L21/00;H05K3/00
主分类号
B05B1/20
代理机构
代理人
主权项
地址
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