发明名称 |
Method for supplying liquid material |
摘要 |
The invention relates to a method for supplying a liquid material from a liquid material supplying means (1) onto a surface of a polygonal or circular glass plate, a semiconductor wafer, or a plate-shaped object (A), wherein a voltage is applied to the liquid material supplying means (1) during the supply of the liquid material. |
申请公布号 |
EP1656999(A1) |
申请公布日期 |
2006.05.17 |
申请号 |
EP20060300051 |
申请日期 |
2001.02.06 |
申请人 |
ORIGIN ELECTRIC CO. LTD. |
发明人 |
SHINOHARA, SHINICHI;KOBAYASHI, HIDEO;NAKAMURA, MASAHIRO;KAJI, KANYA |
分类号 |
B05C5/02;B29C65/04;B29C65/52;C09J5/00;G11B7/26 |
主分类号 |
B05C5/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|