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发明名称
在雷射融除期间用以萃取碎片之装置及方法
摘要
本发明提供一种使用一光源自一基板融除材料之方法及装置,该方法包含以该光源之一光束照射该基板之一区域以自该受照射区域融除基板材料,同时于该受照射区域周围维持一旋涡式气帘,该气帘系由以旋涡方式引导至该基板上该受照射区域周围的气体形成,且于该气帘内形成一指向远离该基板之旋涡,藉此该融除材料包纳于该气帘中并夹带于该旋涡内从而自该基板带走。
申请公布号
TW200615071
申请公布日期
2006.05.16
申请号
TW094117495
申请日期
2005.05.27
申请人
剑桥显示科技有限公司
发明人
艾旭利 拉威尔
分类号
B23K26/14;B23K26/16;B23K26/36
主分类号
B23K26/14
代理机构
代理人
陈长文
主权项
地址
英国
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