发明名称 Light beam preparation arrangement
摘要 A light beam preparation arrangement includes a light tunnel, a rotatable unit, and a drive unit. In one aspect, a fixation rigidly attaches the light tunnel directly to the drive unit. In another aspect, temperature of the light tunnel in controlled. In another aspect, the rotatable unit is spaced a distance from the light tunnel, and the distance is controlled. In another aspect, alignment between the light tunnel and the rotatable unit is controlled. In another apsect, the light tunnel is hollow and a gas flows though the tunnel.
申请公布号 US7046897(B2) 申请公布日期 2006.05.16
申请号 US20030459077 申请日期 2003.06.11
申请人 UNAXIS BALZERS LTD. 发明人 HAGGERTY JOE;CAPELLO STEFFEN;HAFNER ANTON;HEINE-KEMPKENS CLAUS;SPERGER REINHARD;DARR JORGE
分类号 G02B6/00;F21S10/00;F21V;F21V7/04;G02B6/36;G02B7/00;G03B21/14;G03B21/56;H04N9/31 主分类号 G02B6/00
代理机构 代理人
主权项
地址