WAFER KEEPING APPARATUS CAPABLE OF ANCHORING WAFERS RIGIDLY,申请号KR20040092027-传众专利搜索

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发明名称	WAFER KEEPING APPARATUS CAPABLE OF ANCHORING WAFERS RIGIDLY
摘要
申请公布号	KR20060044193(A)	申请公布日期	2006.05.16
申请号	KR20040092027	申请日期	2004.11.11
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	JUNG, KI YONG
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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