SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME,申请号KR20050023409-传众专利搜索

发明名称	SEMICONDUCTOR DEVICE, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME
摘要	A semiconductor device having a semiconductor film formed on a substrate, characterized in that the semiconductor film has laterally grown crystal, and at an end portion of the laterally grown crystal, height of surface projection is lower than film thickness of said semiconductor film, is provided.
申请公布号	KR20060044508(A)	申请公布日期	2006.05.16
申请号	KR20050023409	申请日期	2005.03.22
申请人	SHARP KABUSHIKI KAISHA	发明人	KASHIWAGI IKUMI;NAKAYAMA JUNICHIRO
分类号	H01L21/20;C30B13/24;C30B29/06;H01L21/268;H01L21/336;H01L21/428;H01L21/84;H01L29/04	主分类号	H01L21/20
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