发明名称 Isolated junction structure and method of manufacture
摘要 A MOSFET structure in which the channel region is contiguous with the semiconductor substrate while the source and drain junctions are substantially isolated from the substrate, includes a dielectric volume formed adjacent and subjacent to portions of the source and drain regions. In a further aspect of the invention, a process for forming an isolated junction in a bulk semiconductor includes forming a dielectric volume adjacent and subjacent to portions of the source and drain regions.
申请公布号 US7045468(B2) 申请公布日期 2006.05.16
申请号 US20030646658 申请日期 2003.08.21
申请人 INTEL CORPORATION 发明人 LIANG CHUNLIN
分类号 H01L21/302;H01L21/762;H01L29/06 主分类号 H01L21/302
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