SLIT NOZZLE AND SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a slit nozzle having an opening interval of a discharge port made uniform, without being affected by the nature of respective nozzles.

SOLUTION: A 1st nozzle body part and a 2nd nozzle body part 411 constituting the slit nozzle are included and a fixing screw hole group 414 (a 2nd screw hole group 414b), an opening adjusting screw hole group 416 (an adjusting screw hole group 416b) and a closing adjusting screw hole group 417 (an adjusting screw hole group 417b) are provided on a shim plate. After these members are assembled by screwing fixing bolts to the fixing screw hole group 414, the opening interval is measured. Adjusting screws are screwed to the adjusting screw hole group 416 in a place where the opening interval is narrower than a desired one and adjusting screws are screwed to the closing adjusting screw hole group 417 in a place where the opening interval is wider. As a result, the opening interval of the discharge port is controlled to be made uniform in a Y axial direction.

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