Method for cleaning a surface of a remote plasma generating tube and method and apparatus for processing a substrate using the same,申请号KR20040036416-传众专利搜索

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发明名称	Method for cleaning a surface of a remote plasma generating tube and method and apparatus for processing a substrate using the same
摘要
申请公布号	KR100580584(B1)	申请公布日期	2006.05.16
申请号	KR20040036416	申请日期	2004.05.21
申请人		发明人
分类号	H01L21/304;H01L21/3065;B44C1/22;H01J37/32;H01J37/34;H01L21/677;H01L21/68	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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