| 摘要 |
A probe for test connecting an apparatus contact of a probe apparatus with a test contact of a tested electronic device along a contacting axis has a top structure, a bottom structure a spring member and a guide. The guide may be an outer guide face of the spring member or be part of the bottom or top structure in the form of a circumferential recess or a snap finger. The probe may be guided either slide ably in a rigid carrier structure and/or via its circumferential recess in one or two flexible membranes snapped on a rigid support frame. The probes may be simultaneously fabricated in large numbers by micro fabrication techniques with a fixed fabrication pitch and assembled in a probe apparatus with a probe pitch independently of the fabrication pitch.
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