| 摘要 |
The present invention is directed to an improved reaction process that allows for the achievement of excellent NF<SUB>3 </SUB>production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH<SUB>3</SUB>) produced by the process. The basic NF<SUB>3 </SUB>process resides in reacting F<SUB>2 </SUB>with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF<SUB>3</SUB>. The improvement in the process comprises: introducing F<SUB>2 </SUB>and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; reacting said F<SUB>2 </SUB>and ammonium ion source in said column; and, removing a mixture of NF<SUB>3 </SUB>and byproducts from said column at a second temperature higher than said first temperature.
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