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发明名称
Mapping apparatus for FOUP opener
摘要
申请公布号
KR100581132(B1)
申请公布日期
2006.05.16
申请号
KR20040016687
申请日期
2004.03.11
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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