COMPOSITIONS AND METHODS FOR CHEMICAL MECHANICAL PLANARIZATION OF TUNGSTEN AND TITANIUM,申请号KR20050025138-传众专利搜索

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发明名称	COMPOSITIONS AND METHODS FOR CHEMICAL MECHANICAL PLANARIZATION OF TUNGSTEN AND TITANIUM
摘要
申请公布号	KR20060044795(A)	申请公布日期	2006.05.16
申请号	KR20050025138	申请日期	2005.03.25
申请人	ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.	发明人	MACE TIMOTHY;MUELLER BRIAN L.;YU CHARLES
分类号	B24B37/00;C23F1/16;B44C1/22;C09G1/02;C09K13/00;C23F1/00;C23F3/06;H01L21/304;H01L21/321	主分类号	B24B37/00
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