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发明名称
METHOD FOR FORMING WORD LINE SPACER OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060042498(A)
申请公布日期
2006.05.15
申请号
KR20040091090
申请日期
2004.11.09
申请人
HYNIX SEMICONDUCTOR INC.
发明人
PARK, DONG SU;KIM, SU HO
分类号
H01L21/336;H01L27/108
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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