| 摘要 |
A positioner control device, communicatively coupled to a chamber of a charged particle beam device, CPBD, is configured to contact probes with contact points of a sample positioned in the chamber. A measurer communicatively coupled to the CPBD and the positioner may support measurement/detection of a sample characteristic. A control routine may at least partially automate control of the CPBD, the positioner and measurer. <??>One or more such components support methods which can include: directing first signals to probes positioned within the chamber, where at least one probe is exposed to a beam of the CPBD; comparing second signals to the first signals to determine a sample characteristic; and heating at least one of proximately-positioned probe tips such that one tip becomes sharpened as the heat dislodges portions thereof. <IMAGE> |
