| 摘要 |
A wire bonding apparatus wherein in a high-voltage power supply, an electric torch is connected to the high-voltage side and a wire is connected to the ground side via a ground line, a high voltage is applied across the wire and the electric torch by the high-voltage power supply, thus causing electrical discharge to form a ball on the tip end of the wire, and in a constant-current circuit a current detection circuit, which detects the discharge current, and a high-voltage control circuit, which controls the high voltage in accordance with the discharge current, are provided; and the current detection circuit detects the current that flows through the ground line and is connected to input the detected current into the high-voltage control circuit, and it is judged that the ground line is broken when there is no output from the current detection circuit during the discharge. |
