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发明名称
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号
KR20060043515(A)
申请公布日期
2006.05.15
申请号
KR20050019110
申请日期
2005.03.08
申请人
DAINIPPON SCREEN MFG. CO., LTD.
发明人
NISHIMURA JOICHI;OHTANI MASAMI
分类号
H01L21/02;H01L21/68;G06F11/00;H01L21/00
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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