发明名称 NON-AQUEOUS MICROELECTRONIC CLEANING COMPOSITIONS CONTAINING FRUCTOSE
摘要 Back end photoresist strippers and residue compositions are provided by non-aqueous compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise a polar organic solvent, a hydroxylated amine, and as a corrosion inhibitor fructose.
申请公布号 KR20060043033(A) 申请公布日期 2006.05.15
申请号 KR20050014181 申请日期 2005.02.21
申请人 MALLINCKRODT BAKER, INC. 发明人 INAOKA SEIJI
分类号 C11D3/30;C11D11/00;G03F7/42;H01L21/3213 主分类号 C11D3/30
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