| 摘要 |
<p>A mass flow controller arranged to perform mass flow test operation in the controller itself by incorporating a test tank. The mass flow controller is provided, in a channel (6) for feeding fluid, with a means (8) for detecting the mass flow rate of fluid flowing through the channel and outputting a flow rate signal, and a mechanism (10) for controlling the mass flow rate by varying the valve opening by a valve drive signal, and comprises a means (18) for controlling the flow rate control valve mechanism based on an external flow rate setting signal and the flow rate signal. The flow channel is provided with a test valve section (42) for opening/closing the channel, a test tank section (44) having a specified capacity, and a means (46) for detecting the fluid pressure and outputting a pressure detection signal. A test control means (48) controls mass flow rate test operation to be carried out using the test valve, the test tank section and the pressure detecting means.</p> |
