发明名称 Radio frequency integrated circuits and method of manufacturing the same
摘要 The present invention discloses a radio frequency integrated circuit and a method for manufacturing the same. The radio frequency integrated circuit is manufactured by forming an inductor and a passivation layer on an insulator substrate of a first substrate, forming an element layer having a multi-layer wiring structure on a semiconductor substrate, an inductor coupling line formed on the top portion of the element layer, first and second via contact plugs formed on the inductor coupling line, and an input/output pad coupled to the second via contact plug on a second substrate, and bonding the first substrate onto the second substrate, so that the inductor of the first substrate can be coupled to the first via contact plug of the second substrate. As a result, the radio frequency integrated circuit includes the inductor having a high Q value, by forming the inductor sufficiently separately from the semiconductor substrate on which the elements have been formed.
申请公布号 KR100577527(B1) 申请公布日期 2006.05.10
申请号 KR20030098842 申请日期 2003.12.29
申请人 发明人
分类号 H01L27/04;H01L23/522;H01L25/065;H01L27/06 主分类号 H01L27/04
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