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摘要
申请公布号
JP3774399(B2)
申请公布日期
2006.05.10
申请号
JP20010370753
申请日期
2001.12.04
申请人
发明人
分类号
H01L21/302;H01L21/768;H01L21/3065;H01L21/3205;H01L23/52;H01L23/522
主分类号
H01L21/302
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